PVC1000 series MEMS Micro-Pirani Vacuum Sensors

Based on the principal that the thermal conductivity of gases is proportional to pressure in the low vacuum range, the Posifa sensors measure minute changes in resistance to a heated element resulting from heat transfer to the surrounding gas.

The heated element (i.e. measurement resistor) consists of a platinum thin-film resistor residing on a thermal insulating membrane. The membrane is suspended over a micro-machined cavity that has a bottom surface parallel to the membrane, ensuring precision measurement of heat transfer. Due to the minute volume of the gas measured (i.e. the volume within the cavity), the Micro-Pirani sensor delivers ultra-low power consumption and fast response time.

The Posifa sensors also provide a reference resistor of the same Thermal Coefficient of Resistance (TCR) as the measurement resistor for ambient temperature compensation.

Posifa’s miniaturization of the Pirani technology using MEMS has established the PVC1000 series as the industry standard due to increased reliability, low cost, ease of use and ultra-low power consumption. Posifa’s PVC1000 series sensors help customers leverage this trend to improve their existing products and to develop innovative new products.

Absolute Maximum Ratings

• Operating Temperature: -25 to 85 °C
• Storage Temperature: -40 to 90 °C
• Shock: 100 g peak (5 drops, 3 axis)